Reflected and transmitted light illuminator for Inspection of large wafer and photomarks in the IC industry. The microscopes is equipped with a large size mechanical stage, smooth movement of ball bearing guides having low coaxial controls for x-y movement.
Observation Head
Siedentopf Binocular observation head with adjustable eye piece separation.
Stand
Inverted microscope stand, complete with built-in transformer, calibrated light intensity control, socket and fuse holder
Stage
Graduated mechanical stage, 150x160mm in size, offers 30x30mm cross section motion reading to 0.1mm by vernier. Provided with low coaxial controls.
Illumination
Brightfield vertical illuminator 6V-20W Halogen with aperture diaphragm, filter slots and bulb centring mechanism.
Polarising
Built-in rotatable analyser and lamp polariser filters are provided for dark field illumination.
Objectives
M5x (N.A.0.12), M10x(N.A.0.25), M20x(N.A.0.40) and M40x(N.A.0.65).
M5x-M10x, M20x and M50x.
Eyepieces
Wide field HKW 10x
WF10x and WF 15x
Magnification
50X-400X for visual observation, 20X-165X for 35mm photography and 50X-400X for polaroid photography.
50x to 750x.
Photo Mechanism
Built-in optical path selector (flip-in type) and built-in deviating mirror to direct light to camera. 4X photo-tube for 35mm camera is included
Accessories
Stage clip, 3 stage insert plates (opening 15, 25 and graduated 25 phi-mm), green and blue filters, bulb cord, line cord & spare bulbs.
